Handbook of Vacuum Science and Technology
Hoffman Dorothy, Singh Bawa, Thomas John H. IIIHoffman Dorothy. Handbook of Vacuum Science and Technology 1997 [pdf 829sc 835c. 46.14mb]
I did a little research before I bought this book. It turns out that it paid off - this is a great book for vacuum technology. As a designer of UHV semiconductor equipment, I would highly recommend this text. I bought one more book on the subject at the same time - this one is the better overall choice for complete coverage. I am still looking for a reference that has tips and trick of the trade - but there is enough info in this book to point you in the right direction.Kategorie:
Rok:
1997
Wydanie:
1st
Wydawnictwo:
Academic Press
Język:
english
Strony:
829
ISBN 10:
0123520657
ISBN 13:
9780123520654
Plik:
PDF, 46.14 MB
IPFS:
,
english, 1997